Equipments

UHV Scanning Tunneling Microscope (STM)

Model: Omicron VT

Spec: STM, STS, AFM (beam deflection), SThEM, LEED

• In-operando probe of electron wave functions

• Long working distance optical microscope

• Base pressure 10-10 torr (mbar)  • T=20~500 K

Place: Room 1308, E6-2 building

Contact: Dohyun Kim (김도현), Sangsu Yer (여상수)

Vacuum Probe station+electronics

Model: Lakeshore CRX-VF (Cryofree)

Spec: B=2.5 T, T=10~500 K, gas injection, light illumination (photoconductivity study)

Place: Room 5313, E6-2 building

Contact: Eunji Hwang (황은지)

Atomic Force Microscope (AFM)

Model: Park Systems NX10

Spec: • AFM, KPFM, EFM, C-AFM, MFM, SThEM, Surface Photovoltage

• Scan Range: 100 µm × 100 µm

• Z Stage Range: 25 mm

• CCD: 1 M pixel

• Lens: 10x long working distance lens

Place: Room 5313, E6-2 building

Contact: Yongjoon Lee (이용준)

E-beam Lithography System

Model: Tescan MIRA, Raith Elphy Quantum

Spec: • Resolution=1 nm, Acceleration Voltage=30 kV

• Field-Emission Electron gun • Two Second Electron detector

Place: Room 2314, N5 building

Contact: Hoyeon Yoo (유호연)

Shared facility with Prof. Byong Guk Park (KAIST MSE), Prof. Kab-Jin Kim (KAIST Physics)

E-beam Evaporator

Model: Young High Tech company design

Spec: • Max Voltage=9 kV, optimized for lift-off process

• 6 sockets (Cu or graphite crucible) • Au, Cr, Pt, Mo, Py (Ni:Fe=81:19 wt%), Al2O3, Nb, Ta

Place: Room 2314, N5 building

Contact: Heemyoung Hong (홍희명)

Glove Box System

Model: Korea Kiyon KK-021AS

Spec: • Single Side Window with 4 ports  • Two Antechambers

• Atmosphere Condition: H2O, O2 < 1ppm  • Real-time H2O, O2 monitoring system

Place: Room 5310, E6-2 building

Contact: Woohyun Cho (조우현)

Reactive Ion Etching (RIE)

Model: Femto Science CIONE

Spec: • Gas: SF6, Oxygen, Ar gas, Vacuum Level: high 10-4 torr

• Maximum Power: 100 W

Place: Cleanroom E3-3 building

Contact: Juyeong Jeong (정주영)

Shared facility with Prof. Kibum Kang (KAIST MSE), Prof. Kayoung Lee (KAIST EE)

Dry Transfer System

Model: Mirea Technology

Spec: Dry transfer in ambient and Ar conditions

• Motor resolution: 1 μm  • Objective lens: x2, x5, x10, x20, x50

Place: Room 5310, E6-2 building

Contact: Woohyun Cho (조우현)

Raman spectrometer

Model: Nanobase XperRAM C Series

Spec: •Laser Wavelength: 532 nm

•Raman Shift Resolution: 2 cm-1

•Grating : 1800 gr/mm

Place: Room 5313, E6-2 building

Contact: Woohyun Cho (조우현)

Electronics

Model: Keithley 4200, 2000, 2182A, 2636B, 6221, etc.

•Stanford lock-in amplifier SR830

Spec: see technical documents

Place: Room 5313, E6-2 building

Contact: Juyeong Jeong (정주영)

Maskless Photolithography System

Model: Illuminaid LITHO Maskless

Spec: • Laser Wavelength: 405 nm

• Maximum Intensity: 1300 mW/cm2

• Resolution : 2 µm

Place: Room 2319, E6-2 building

Contact: Eunji Hwang (황은지)

Optical Microscopes

Model: NICKON LV100NS (left), SDPTOP SZMN SOK (right)

Spec: • 5x, 10x, 20x, 50x, 100x (left), 0.5x~5x (right)

• CCD Imaging, wire bonding

Place: Room 5310 (left), 5313 (right), E6-2 building

Contact: Euji Hwang (황은지)

Electronic Scale

Model: KERN ABJ-NM

Spec: • 0.001 g resolution for weighing

Place: Room 5310, E6-2 building

Contact: Woohyun Cho (조우현)

Oven, Desiccator

Model: No Brand

Spec: Basic dry and sample storage

Place: Room 5310, E6-2 building

Contact: Woohyun Cho (황은지)

Spin Coater

Model: No Brand

Spec: Basic resist coating, two-step programing

Place: Room 5310, 2319 (Yellow room), E6-2 building

Contact: Juyeong Jeong (황은지)

Hot Plate & Stirrer

Model: HSD120

Spec: Max T=200 ℃ 

Place: Room 5310, 2319 (Yellow room), E6-2 building

Contact: Juyeong Jeong (정주영)

Chemical Storage

Model: No Brand

Spec: Ventilation

Place: Room 5310, E6-2 building

Contact: Juyeong Jeong (정주영)