Equipments
UHV Scanning Tunneling Microscope (STM)
Model: Omicron VT
Spec: STM, STS, AFM (beam deflection), SThEM, LEED
• In-operando probe of electron wave functions
• Long working distance optical microscope
• Base pressure 10-10 torr (mbar) • T=20~500 K
Place: Room 1308, E6-2 building
Contact: Dohyun Kim (김도현), Sangsu Yer (여상수)
Vacuum Probe station+electronics
Model: Lakeshore CRX-VF (Cryofree)
Spec: B=2.5 T, T=10~500 K, gas injection, light illumination (photoconductivity study)
Place: Room 5313, E6-2 building
Contact: Eunji Hwang (황은지)
Atomic Force Microscope (AFM)
Model: Park Systems NX10
Spec: • AFM, KPFM, EFM, C-AFM, MFM, SThEM, Surface Photovoltage
• Scan Range: 100 µm × 100 µm
• Z Stage Range: 25 mm
• CCD: 1 M pixel
• Lens: 10x long working distance lens
Place: Room 5313, E6-2 building
Contact: Yongjoon Lee (이용준)
1.5 K Magnetotransport Cryostat Systems+electronics
Model: Oxford Teslatron PT 12 T and 8 T (Two cryo-free systems)
Spec: He-4 VTI and inserts, B=12 T and 8 T, T=1.5 K
Place: Room 5313, E6-2 building
Contact: Juyeong Jeong (정주영)
E-beam Lithography System
Model: Tescan MIRA, Raith Elphy Quantum
Spec: • Resolution=1 nm, Acceleration Voltage=30 kV
• Field-Emission Electron gun • Two Second Electron detector
Place: Room 2314, N5 building
Contact: Hoyeon Yoo (유호연)
Shared facility with Prof. Byong Guk Park (KAIST MSE), Prof. Kab-Jin Kim (KAIST Physics)
E-beam Evaporator
Model: Young High Tech company design
Spec: • Max Voltage=9 kV, optimized for lift-off process
• 6 sockets (Cu or graphite crucible) • Au, Cr, Pt, Mo, Py (Ni:Fe=81:19 wt%), Al2O3, Nb, Ta
Place: Room 2314, N5 building
Contact: Heemyoung Hong (홍희명)
Glove Box System
Model: Korea Kiyon KK-021AS
Spec: • Single Side Window with 4 ports • Two Antechambers
• Atmosphere Condition: H2O, O2 < 1ppm • Real-time H2O, O2 monitoring system
Place: Room 5310, E6-2 building
Contact: Woohyun Cho (조우현)
Reactive Ion Etching (RIE)
Model: Femto Science CIONE
Spec: • Gas: SF6, Oxygen, Ar gas, Vacuum Level: high 10-4 torr
• Maximum Power: 100 W
Place: Cleanroom E3-3 building
Contact: Juyeong Jeong (정주영)
Shared facility with Prof. Kibum Kang (KAIST MSE), Prof. Kayoung Lee (KAIST EE)
Dry Transfer System
Model: Mirea Technology
Spec: Dry transfer in ambient and Ar conditions
• Motor resolution: 1 μm • Objective lens: x2, x5, x10, x20, x50
Place: Room 5310, E6-2 building
Contact: Woohyun Cho (조우현)
Raman spectrometer
Model: Nanobase XperRAM C Series
Spec: •Laser Wavelength: 532 nm
•Raman Shift Resolution: 2 cm-1
•Grating : 1800 gr/mm
Place: Room 5313, E6-2 building
Contact: Woohyun Cho (조우현)
Electronics
Model: Keithley 4200, 2000, 2182A, 2636B, 6221, etc.
•Stanford lock-in amplifier SR830
Spec: see technical documents
Place: Room 5313, E6-2 building
Contact: Juyeong Jeong (정주영)
Maskless Photolithography System
Model: Illuminaid LITHO Maskless
Spec: • Laser Wavelength: 405 nm
• Maximum Intensity: 1300 mW/cm2
• Resolution : 2 µm
Place: Room 2319, E6-2 building
Contact: Eunji Hwang (황은지)
Two-Zone Furnaces (S- and Te-based ones) (left)
One-Zone Furnace (middle)
Box Furnace (right)
Model: Nano Tech Planet
Spec: N2, H2, Max T=1100 ℃
Place: Room 2314, N5 building
Room 5310, E6-2 building (box furnace)
Contact: Woohyun Cho (조우현)
Optical Microscopes
Model: NICKON LV100NS (left), SDPTOP SZMN SOK (right)
Spec: • 5x, 10x, 20x, 50x, 100x (left), 0.5x~5x (right)
• CCD Imaging, wire bonding
Place: Room 5310 (left), 5313 (right), E6-2 building
Contact: Euji Hwang (황은지)
Electronic Scale
Model: KERN ABJ-NM
Spec: • 0.001 g resolution for weighing
Place: Room 5310, E6-2 building
Contact: Woohyun Cho (조우현)
Oven, Desiccator
Model: No Brand
Spec: Basic dry and sample storage
Place: Room 5310, E6-2 building
Contact: Woohyun Cho (황은지)
Spin Coater
Model: No Brand
Spec: Basic resist coating, two-step programing
Place: Room 5310, 2319 (Yellow room), E6-2 building
Contact: Juyeong Jeong (황은지)
Hot Plate & Stirrer
Model: HSD120
Spec: Max T=200 ℃
Place: Room 5310, 2319 (Yellow room), E6-2 building
Contact: Juyeong Jeong (정주영)
Chemical Storage
Model: No Brand
Spec: Ventilation
Place: Room 5310, E6-2 building
Contact: Juyeong Jeong (정주영)